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vias in tsmc 013 technology

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yxo

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Hello colleagues,
I am wondering about how low the resistance of vias in tsmc 013. I have not found the numbers in the design rules, however after exctraction I got only 1 Ohm. Is it really might be true? Thank you.
 

Hallo yxo,
sure: The resistance of an Al cupoid with an edge length of 0.15µm and a height of 0.5µm (estimated dimensions) is just 0.6 Ohms. If it's W (tungsten), it's about the double value.
HTH! erikl
 

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    yxo

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