Steps in a typical CMOS process

[rajesh13]

Can some body help me in explaining the diffrent processing steps in a typical cmos process, (it will be good if some body can send me a link, where I can find varoius cross section of MOS step by step).

 

[Hughes]

cmos process steps

Search in google:
cmos process flow filetypedf
You will get a lot. Here is one of the results:
**broken link removed**

 

[rajesh13]

Re: cmos process steps

Thanks,

well this does not gives STI process details.

 

[hoangthanhtung]

Re: cmos process steps

Can some body help me in explaining the diffrent processing steps in a typical cmos process, (it will be good if some body can send me a link, where I can find varoius cross section of MOS step by step).

More document ....................................

 

[rajesh13]

Re: cmos process steps

More document ....................................[/quote]

I think the file is not mirrored yet.

 

[sunking]

Re: cmos process steps

 

[rajesh13]

Re: cmos process steps

Can some body help me in explaining the diffrent processing steps in a typical cmos process, (it will be good if some body can send me a link, where I can find varoius cross section of MOS step by step).

More document ....................................

This document gives a very surfacial information (does not tell about STI, LDD, channel implants etc)

 

[Colbhaidh]

Re: cmos process steps

Try this. I only generated up to where the dielectrics would be placed for contacts and metals as this should be pretty much generic. Could not be bothered drawing nay more ......
Explains STI and LDD formation I think.