Where can I find the DFM documents?

[faye_hongdou]

Hi,

Anyone has the document for DFM(design for manufacturability)? Or where can I get it?

thx

faye_hongdou

 

[tochaHCM]

this is a good website to start
https://www.design4manufacturability.com/

 

[jason_lee]

browse the web site but it seems the relevance to ASIC Design is quite low....any suggestion for other resources?

 

[rahulk_123]

Just saw some info in

TSMC Reference Flow 5.0

Extract below

DFM Flow
Router-based dummy metal insertion

Current status:
Able to add specified rectangular patterns in router. Faster dummy insertion and RC extraction run time than utility. Different rectangular patterns for .13u and N90 designs.

ECO flow: Should maintain previous inserted dummy metals during ECO and only removes those touch ECO wires to minimize timing impact.

Redundant via insertion

Current status: Scan all via in the insertion process

ECO flow: Scan only via in ECO nets for insertion to save run time An option to avoid redundant via insertion causing DRC violations in order to avoid ECO route and maintain timing closure.

May the above might help