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What is the nature of plasma impedance?

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abhishek_rathod50

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What is the nature of plasma impedance. Is it capacitive or inductive? I am talking about the applications related to Plasma enhanced chemical vapor deposition (PECVD).
 

dfullmer

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Re: Plasma Impedance

Hi abhishek_rathod50,

I do not work with the type of plasma you are talking about but I can tell you that in energy discharge lamps Like flashlamps the plasma acts more like a low ohm resistor than anything else. I do have a plasma book at home and will look to see if there is a better explanation.

Let you know if I find anything.

if not good luck

dfullmer
 

chau_s79

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Re: Plasma Impedance

Hi Abhishek,
Capacitiviely coupled plasma systems are used for PECVD. At least to my knowledge, i have only seen capacitively coupled systems being used for PECVD.
I have done some work on measuring the impedance of such systems and also designing on an impedance matching network for the same.
Contact me on chau_s79@rediffmail.com.
May be i will be help you out in some way.
 

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