Welcome to our site! EDAboard.com is an international Electronics Discussion Forum focused on EDA software, circuits, schematics, books, theory, papers, asic, pld, 8051, DSP, Network, RF, Analog Design, PCB, Service Manuals... and a whole lot more! To participate you need to register. Registration is free. Click here to register now.
I do not work with the type of plasma you are talking about but I can tell you that in energy discharge lamps Like flashlamps the plasma acts more like a low ohm resistor than anything else. I do have a plasma book at home and will look to see if there is a better explanation.
Capacitiviely coupled plasma systems are used for PECVD. At least to my knowledge, i have only seen capacitively coupled systems being used for PECVD.
I have done some work on measuring the impedance of such systems and also designing on an impedance matching network for the same.
Contact me on firstname.lastname@example.org.
May be i will be help you out in some way.