Slotting In Inductor Layout?

[hrkhari]

Hai Guys:

When a spiral inductor with W>10um and distance S=2um is realized. Metal slotting and distance of min 10um between metal layer W>10um errors appears during the DRC check up, is it possible to slot the inductor metal or it shall be ignored. Thank You

Rgds

 

[Humungus]

It depends on the rekliability offered by non-slotted metal. If you are sure that not slotting your metal track will not affect circuit reliability due to mechanical stress, then forget about slots. On the other hand, if slots must be introduced, consider that slots will slightly change the value of your inductor and, as the will increase the total resistance, for sure they'll have an impact on the inductor's Q factor