I fear, your suggested steps don't fulfill their purpose, for various reasons. In my opinion, they sound like a more detailed version of your previous statement "I almost have no info about Rf networks". It's obvious, that you have neither the general electrical/RF engineering nor the application specific ICP background.
To mention a few points:
1. A generator has a specified output impedance, often 50 ohm. It's achieved at the generators operation frequency and can't be measured with a ohmmeter (although some wideband test generators possibly expose 50 ohm impedance downto DC)
2. A transformer can be specified by it's windings ratio. It transforms impedances according to the square of this ratio. If it has a real impedance on it's own, it's made up by winding resistances and core losses, both are unwanted properties of real transformers. Particularly for a kW application, the winding resistances (at the operation frequency, also considering skin and proximity effect) must be really low.
3. The most serious problem is with the coil or "antenna" impedance. As mentioned before, the coil is basically an inductance. Very similar to the transformer windings, it should have ideally zero DC resistance and also not produce RF losses on it's own. Ideally, the plasma should be the only real impedance loading the coil. That also means, you can't measure the coil's real impedance part without igniting a plasma.
An ICP expert can most likely give quantitative estimations when knowing your design.