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Overview of nanolithography methods

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reza56

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nanolithography is a basic work in future integration
we have some famous method,they are as follows:
1)dip pen nano lithography
2)EUV nanolithography.
3)electron beam nanolithography.
4)X-ray beam nanolithography.
5)Ion-beam nanolithography.

but now I want to have a general overview of the ayatems that implement these technologies.
 

elvis09

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Re: nanolithography

Hi reza56,

take a look at the EPFL (switzerland) site about papers on nanolithography process, like nanostencil :
http://lmis1.epfl.ch/page5603-en.html

You can also take a look at the pdf documents :
http://www.phantomsnet.net/files/EUprojects/BUN.pdf
http://deutsche-boerse.com/.../10_d...c/20_workshops/65_NanoEquity2005/Suess_EU.pdf
http://www.nanospain.org/Workshop2/...ofabrication Methods/PerezMurano_Francesc.pdf

or you can type keywords in the search motor engine of the web site of these labs:
IBM Zurich,
EPFL Lausanne,
LAAS France,
CEMES France

Kind regards,

Elvis



reza56 said:
nanolithography is a basic work in future integration
we have some famous method,they are as follows:
1)dip pen nano lithography
2)EUV nanolithography.
3)electron beam nanolithography.
4)X-ray beam nanolithography.
5)Ion-beam nanolithography.

but now I want to have a general overview of the ayatems that implement these technologies.
 

Aircraft Maniac

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nanolithography

Are you interested in learning how to design ebeam lithography machine with all electronmagnetic lenses and ultra high vacuum chambers?
 

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