Need help, RF MEMS simulation with HFSS

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elektrotechnik33

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rf mems phase shifter +hfss

Hi,

I need help and support in simulating of RF MEMS switch with HFSS. The simulation is about having a normal coplanar waveguide with a normal switch over it. When the switch is up, there is no interference of the t-line. On the other hand, when switch is down, the dielectric switch will have an effect on the signal on the t-line, leads the phase difference in comparison to the up-state. I would like to plot or calculate this phase difference between up- and down-state with HFSS but really don't know how. Could anybody please tell me how to do so in HFSS or how to calculate the phase shift based on HFSS program by extracting parameters or anything. Thanks a lot!!

Nat
 

mems hfss

you should see s11 and s21.
when switch is up s21 is near 0 or 1db
and s11 is very low.
 

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