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Untill today, I find only references through technical journals beneficial giving out inputs for RF CMOS Inductors modelling, however books on substrate noise modelling would also give an added advantage. Hope this helps
there is an example included with momentum show the simulation of spiral inductor over sillicon substrate
and check agilent web site u will find some flash movies there
hope that it can help
and also u must have a detailed cross section of the process u will design the inductoe with
also try IE3d , there is a good example in the documentation , included how to measure quality factor
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