dreamyboy_999
Member level 2
Hi. I am using TSMC65nm design kit and Calibre for DRC. I am facing two general violations that I would be thankful if anyone can help with. I am doing DRC for a simple fill cell (5 um x 5 um) that contains all the metal layers and vias. There are the errors:
1. "It is not allowed to have local density > 0.8 of all three consecutive metal layers (M1,M2,M3) over any 50 um x 50 um window". My cell is 5 um x 5 um, so i assume it is less than 0.8 of 50 um x 50 um....
2. "DM1 is a must. The DM1 CAD layer must be different from M1 CAD layer." I assume DM1 stand for metal 1 dummy layer. I have no idea what a dummy layer is + it is not even among the used layers in the design....
1. "It is not allowed to have local density > 0.8 of all three consecutive metal layers (M1,M2,M3) over any 50 um x 50 um window". My cell is 5 um x 5 um, so i assume it is less than 0.8 of 50 um x 50 um....
2. "DM1 is a must. The DM1 CAD layer must be different from M1 CAD layer." I assume DM1 stand for metal 1 dummy layer. I have no idea what a dummy layer is + it is not even among the used layers in the design....