ccw27
Full Member level 5
Hi,
Why use 2 or more column diffusion contact instead of 1 in deep submicron, i.e. <0.15um process? I was told it reduces LOD effect and Vt mismatch. What is LOD effect? Also I was told to use dummy poly to improve mismatch and LOD effect.
Anyone has any other layout recommendation for deep submicron technology?
Thanks
Why use 2 or more column diffusion contact instead of 1 in deep submicron, i.e. <0.15um process? I was told it reduces LOD effect and Vt mismatch. What is LOD effect? Also I was told to use dummy poly to improve mismatch and LOD effect.
Anyone has any other layout recommendation for deep submicron technology?
Thanks