Charge based capacitence measurement for MOS devices

[BB11]

Hello

What is CBCM- Charge based capacitence measurement Methods for Mos Devices?. Why do we need it and What are the advantages of using these methods?

Thanks

BB

 

[erikl]

Get info about this method and its usage from the EKV literature. The EKV models are totally based on charge based analysis methods.

 

[timof]

CBCM (Charge based capacitance measurement) is a special measurement method and test structure for accurate measurement of very small (down to attofarad level) on-chip capacitances (mainly - for metal interconnects capacitance characterization).

https://www.eecs.berkeley.edu/~hu/PUBLICATIONS/Hu_papers/Hu_Melvyl/Hu_Melvyl_97_03.pdf