Could anybody help me with the typical values of the ------ change in the resonant frequency of the cavity (u can take 10 Ghz for instance) to the corresponding shift in the proof mass connected to a flexure membrane.
Any relation would be useful too.
Or if we could use the simple spring mass model to calculate the shift in the membrane and the corresponding tension developed in it
Sounds plausible at first sight. Application of "the simple spring mass model" however requires to know the respective spring constant. Do you? Basically, it's more a mechanical engineering than electronics problem.
Well Sir, I think we could use the Young's modulus of the membrane and determine the stress for a particular strain (assuming the strain to be only normal in nature).
But actually I don't know how it is really done in realtime applications.
And it would be quite helpful if you can refer any previous datasheets on typical resonator accelerometers.
Thank you.