Sorry for the picture, having some problem in uploading !!
AMSA84, are you using UMC180 technology library files?
I used ME1 to ME6 layers and ME1_ME2 via upto ME5_ME6 via to connect the capacitor to the ME1 layer. In the DRC check, it is showing no errors, but in LVS, errors are coming like - Device Mismatch : MIMCAPS_MM is present in schemaic but not present in layout, etc.
Can I use any other capacitors in replacement of MIMCAPS_MM or MIMCAPS_RF that do not have these layer problems?