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Capacitance of a silicon line (wire)

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carbon9

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Dear all,

I'm to calculate the (static or dynamic) capacitance of a silicon wire shown in the Figure below. When a bias is applied to the metal electrodes, a current passes through the silicon wire. And by using Suprem, I can calculate the 3-D charge density inside the silicon wire, say rho(r) where r is the 3-D position vector.

28k11k3.jpg


Now, I want to calculate the capacitance of the wire as a function of rho(r). Could you please give an idea?

Regards,
 

carbon9 said:
... by using Suprem, I can calculate the 3-D charge density inside the silicon wire ...
Click to expand...
Next, you must calculate the potential density distribution against an isolated and may be idealized substrate. And then the tensor/matrix division ...
 

May be, this web site is hlpfull for you:

**broken link removed**
 

Dear erikl and AdvaRes thank you for your help.

Erikl, could you please detail the calculation of the capacitance using rho(r) and potential density distribution?

Regards,
 

carbon9 said:
Erikl, could you please detail the calculation of the capacitance using rho(r) and potential density distribution?
Regards,
Click to expand...

Sorry, carbon9,
I've never worked with the Supreme tool. My answer was just of theoretical nature:
If you can calculate the 3D-matrices of charge density distribution & potential distribution (e.g. potential against an ideal substrate environment), then it should be possible to divide these 3D-matrices by each other and get C=Q/V by summing up this ratio over the whole of your line/wire.

Cheers, erikl
 

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    carbon9

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Thanks Erikl. Unfortunately, Suprem does not output the voltage distribution...
I have only rho(r) and bias voltage between two electrodes.

Again thanks for your replies.

Regards
 

Thanks AdvaRes, Silvaco seems to make this work easily ;)
 

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