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Regarding 65nm DFM Rules.

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omsi

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Hello,
I am working on UMC65nm process.I am getting the DFM error as following:

POLY1 gates with width <=0.08um not over TG should be align one direction.
Horizontal direction is preferred.

Can Anyone tell why those gate orientations are asked to follow in horizontal?
Is there any fabricating issue or reason for that?

Please Reply,
Thanks in advance,
Omsi.
 

This is so detailed question,why not just ask their technical supporter if you can get the PDK?
 

It means your poly over diffusion can have ONLY one direction, and the preferred on is horizontal. This requirement is for printing exact narrow poly at 65nm node
 

All gates must be aligned in one direction... it's a lithography issue.
 

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