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Bulk micromachining of microstrip patch atenna array in HFSS

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ashinitj

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hi evryone!!
m doin my project on this topic and my freq of interest is 14.5 GHz on silicon substrate (thickness 550um). what should be the optimum membrane thickness to attain optimum performance from the antenna in terms of radiation efficiency and gain etc.


help itz urgent!!

thanks in anticipation
 

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