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What is the LOD effect?

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elbadry

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lod effect

Hi all,

Does anybody have data on the LOD effect? What LOD stands for?

What I understand is that it is a stress effect related to the use of STI. More Data / resources on the subject would be highlu appreciated


Regards,
Elbadry
 

lod stress effect

LOD means Length of Diffusion.
Refer the following document and let me know if this helps :
**broken link removed**

Regards,
Sandeep
 
lod effect?

Can anyone please upload the above pdf. Bcoz I don't have any ieee account. Thanks in advance.

Varma.
 

lod effect

you don't need an IEEE account - just type the link
 

lod_effect

No requirement for ieee account.
Let me know if you still want me to upload.
 

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