Why is aluminium better for integrated circuit fabrication?

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Aluminiun or copper

Hi,
why is it that aluminium is the more preffered metal (over copper) when it comes to integrated circuit design fabrication.
even though the resistance of copper is roughly half that of aluminum?
why is polysilicon chosen as the gate contact?
 

Re: Aluminiun or copper

On parameter is that aluminum makes good electrical contact to silicon. Do you remember copper oxide rectifiers?

Polysilicon can be doped. This is part of the self alignment gate method. Aluminum would not withstand the high temperature.
 

Aluminiun or copper

It is related to etching property of the copper, it is more difficult to etch the copper than aliminium.
The reason for poly silicon is as pointed out
temperature
 

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