Why dummy metals dont require OPC?

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smihaan

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OPC for dummy

Why dummy metals dont require OPC?
 

Re: OPC for dummy

what do you mean by OPC
 

Re: OPC for dummy

Optical Proximity Correction
 

Re: OPC for dummy

smihaan said:
Why dummy metals dont require OPC?

Because they're only dummies, and their only purpose is to get the layer coverage to the required level (necessary to guarantee a good yield at the concerned technological work step). Hence no accuracy for the dummies' shapes is required, and this saves CPU time for OPC dataBase calculation.
 

Re: OPC for dummy

I normally hear that OPC checks are important for deep submicron technologies. But I couldnt get much info on how OPC correction is done and its significance. Can anyone explain it?
 

Re: OPC for dummy

See here for an overview and further links:
 

Re: OPC for dummy

OPC is a photolithography enhancement technique commonly used to compensate immage errors. OPC increase the fidelity of pattern transfer to the wafer.

Usually in technology used by me, you have the possibility to generate dummy with or without OPC.
 

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