Feb 1, 2006 #1 J jelydonut Full Member level 4 Joined Dec 27, 2002 Messages 239 Helped 3 Reputation 6 Reaction score 0 Trophy points 1,296 Activity points 1,730 as the topic asks.. thanks jelydonut
Feb 1, 2006 #2 B bc70 Newbie level 5 Joined Aug 25, 2005 Messages 10 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,384 It helps to prevent dishing during the CMP process used in copper polishing.
Feb 1, 2006 #3 J jelydonut Full Member level 4 Joined Dec 27, 2002 Messages 239 Helped 3 Reputation 6 Reaction score 0 Trophy points 1,296 Activity points 1,730 What exactically is meant by dishing? Also, if you have a 30um wide power ring and DRC rules dictate that say, 20um x 300um require slots.. do you have to put slots in the power ring? If you don't want could the concequences be? jelydonut
What exactically is meant by dishing? Also, if you have a 30um wide power ring and DRC rules dictate that say, 20um x 300um require slots.. do you have to put slots in the power ring? If you don't want could the concequences be? jelydonut
Feb 2, 2006 #4 C coolrak Member level 4 Joined Aug 16, 2005 Messages 73 Helped 4 Reputation 8 Reaction score 0 Trophy points 1,286 Activity points 1,989 Slots are used to satisly the maximum wire density technology rules. SO by using slots you can control the wire densisty and meet the requirements
Slots are used to satisly the maximum wire density technology rules. SO by using slots you can control the wire densisty and meet the requirements