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Why are slots required in wide metal?

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jelydonut

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as the topic asks..

thanks

jelydonut
 

bc70

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It helps to prevent dishing during the CMP process used in copper polishing.
 

jelydonut

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What exactically is meant by dishing?

Also, if you have a 30um wide power ring and DRC rules dictate that say, 20um x 300um require slots.. do you have to put slots in the power ring? If you don't want could the concequences be?

jelydonut
 

coolrak

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Slots are used to satisly the maximum wire density technology rules. SO by using

slots you can control the wire densisty and meet the requirements
 

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