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Why are slots required in wide metal?

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jelydonut

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as the topic asks..

thanks

jelydonut
 

It helps to prevent dishing during the CMP process used in copper polishing.
 

What exactically is meant by dishing?

Also, if you have a 30um wide power ring and DRC rules dictate that say, 20um x 300um require slots.. do you have to put slots in the power ring? If you don't want could the concequences be?

jelydonut
 

Slots are used to satisly the maximum wire density technology rules. SO by using

slots you can control the wire densisty and meet the requirements
 

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