Re: whats equation between Leff and tox in mosfet structure?
i finally resulted this by relation above i.e. cox=ebsilon* W*L*1/tox
and relation Vth and this point that in design vth=.3 vdd
we can determine tox,in certain technology.
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and we should attend to this point that limitation of gate oxide thickness
Limit of gate oxide thickness scaling in MOSFETs due … - Koh - Cited by 54:
Meishoku Koh et al: "Limit of Gate Oxide Thickness Scaling in MOSFETs due to Apparent Threshold Voltage Fluctuation Induced by Tunnel Leakage Current", IEEE Transactions on Electron Devices, Vol. 48, No. 2. February 2001
A silicon nanocrystals based memory - Tiwari - Cited by 1881
and the article that my friend erikl hints to,
it shows list table tox for many technologies
https://wenku.baidu.com/view/1959122ae2bd960590c677b9
my friends, thanks very much for your attention, if i get better result i will post another