Apr 13, 2013 #1 S somayehbd Newbie level 3 Joined Nov 6, 2010 Messages 4 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,300 sio2 is better or nitride? why what is diffrence between mim capacitor characteristics whit sio2 and whit nitride layer as insulator? please help me:---(
sio2 is better or nitride? why what is diffrence between mim capacitor characteristics whit sio2 and whit nitride layer as insulator? please help me:---(
Apr 13, 2013 #2 D dick_freebird Advanced Member level 7 Joined Mar 4, 2008 Messages 8,957 Helped 2,333 Reputation 4,683 Reaction score 2,512 Trophy points 1,393 Location USA Activity points 71,383 Nitride will stand off more field, so give you more C density for a given working voltage. But it has some nasty charge behaviors as I recall. Still people use it, maybe it's more a no-no as a MOS gate dielectric than as a simple capacitor. Si3N4 or SiO2 both are deposited dielectrics, in the MIM context. You can also find, rarely, an Al2O3 native-grown dielectric on the bottom plate.
Nitride will stand off more field, so give you more C density for a given working voltage. But it has some nasty charge behaviors as I recall. Still people use it, maybe it's more a no-no as a MOS gate dielectric than as a simple capacitor. Si3N4 or SiO2 both are deposited dielectrics, in the MIM context. You can also find, rarely, an Al2O3 native-grown dielectric on the bottom plate.
Apr 13, 2013 #3 S somayehbd Newbie level 3 Joined Nov 6, 2010 Messages 4 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,300 thanks for reply me please tell me what is difference between sio2 and nitrid in deposition and difference between them in mim capasitior making
thanks for reply me please tell me what is difference between sio2 and nitrid in deposition and difference between them in mim capasitior making
Apr 14, 2013 #4 S somayehbd Newbie level 3 Joined Nov 6, 2010 Messages 4 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,300 please help me