what is the pitch doubling?

Status
Not open for further replies.
M

ms_90

Member level 2
Joined
Apr 9, 2014
Messages
46
Helped
1
Reputation
2
Reaction score
1
Trophy points
8
Activity points
275
i have gone through Wikipedia..so i came to know that it is related with double patterning process, but i didn't get the exact meaning. Can anybody please explain it in simpler and shorter way?
 

Please check page 3 of below paper.
**broken link removed**
 
Reactions: ms_90

    M

    ms_90

    Points: 2
    Helpful Answer Positive Rating
Status
Not open for further replies.

Similar threads

Menu
Log in
Register
Cookies are required to use this site. You must accept them to continue using the site. Learn more…