Sep 28, 2007 #1 A abhishek_rathod50 Newbie level 5 Joined May 5, 2007 Messages 9 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,346 What is the nature of plasma impedance. Is it capacitive or inductive? I am talking about the applications related to Plasma enhanced chemical vapor deposition (PECVD). The operating frequency is 70MHz.
What is the nature of plasma impedance. Is it capacitive or inductive? I am talking about the applications related to Plasma enhanced chemical vapor deposition (PECVD). The operating frequency is 70MHz.
Nov 3, 2008 #2 D dee25pak Junior Member level 3 Joined Jun 18, 2008 Messages 29 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,286 Activity points 1,431 Re: Plasma Impedance did you got the answer of your question. if yes kindly share with me. I am also interested in knowing this.
Re: Plasma Impedance did you got the answer of your question. if yes kindly share with me. I am also interested in knowing this.