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What is the nature of plasma impedance?

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abhishek_rathod50

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What is the nature of plasma impedance. Is it capacitive or inductive? I am talking about the applications related to Plasma enhanced chemical vapor deposition (PECVD). The operating frequency is 70MHz.
 

dee25pak

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Re: Plasma Impedance

did you got the answer of your question. if yes kindly share with me. I am also interested in knowing this.
 

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