Gayathri Jeyaram
Junior Member level 1
What are line end shortening and phase shift mask ?
As the feature size reduces below 193 nm (imaging wavelength), certain correction are done for better manufacturability and as a compensation for photolithography, etching, planarization and deposition.
https://en.wikipedia.org/wiki/Resolution_enhancement_technologies
In this context, what are line end shortening and phase shift masks ?
As the feature size reduces below 193 nm (imaging wavelength), certain correction are done for better manufacturability and as a compensation for photolithography, etching, planarization and deposition.
https://en.wikipedia.org/wiki/Resolution_enhancement_technologies
In this context, what are line end shortening and phase shift masks ?