Jan 20, 2006 #1 G gayaneg Newbie level 1 Joined Jan 8, 2006 Messages 1 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,289 Hi! Could anybody tell me, what is a shallow trench isolation? And its purpose. Thanks in advance!
Jan 22, 2006 #2 D demodb Member level 4 Joined Oct 4, 2005 Messages 69 Helped 4 Reputation 8 Reaction score 3 Trophy points 1,288 Activity points 1,844 this is a way of isolating structures on a substrate, e.g. a nmos and a pmos. This way is preferred over LOCOS, because it uses a minimal area.
this is a way of isolating structures on a substrate, e.g. a nmos and a pmos. This way is preferred over LOCOS, because it uses a minimal area.
Jan 23, 2006 #3 W wwwww25 Newbie level 1 Joined Jan 19, 2006 Messages 1 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,286 STI is usually used in .25 .18 and .13micron process.
Jan 24, 2006 #4 M manissri Full Member level 5 Joined Apr 16, 2005 Messages 281 Helped 9 Reputation 18 Reaction score 3 Trophy points 1,298 Activity points 3,279 to reduce the narrow width effect we genrally do the shallow trench isolation regrds manis
Jan 24, 2006 #5 rfsystem Advanced Member level 3 Joined Feb 25, 2002 Messages 908 Helped 149 Reputation 294 Reaction score 38 Trophy points 1,308 Location Germany Activity points 9,548 The fill of the trench introduce local lateral mechanical stress. So with <=0.25u you a get a further mismatch contributor.
The fill of the trench introduce local lateral mechanical stress. So with <=0.25u you a get a further mismatch contributor.
Jan 30, 2006 #6 Y YESH_23 Member level 4 Joined Dec 20, 2005 Messages 78 Helped 8 Reputation 16 Reaction score 4 Trophy points 1,288 Location INDIA Activity points 1,951 what is meant by narrow width effect...? thanx in advance