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What is a shallow trench???

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gayaneg

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Hi!

Could anybody tell me, what is a shallow trench isolation? And its purpose.

Thanks in advance!
 

demodb

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this is a way of isolating structures on a substrate, e.g. a nmos and a pmos. This way is preferred over LOCOS, because it uses a minimal area.
 

wwwww25

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STI is usually used in .25 .18 and .13micron process.
 

manissri

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to reduce the narrow width effect we genrally do the shallow trench isolation
regrds
manis
 

rfsystem

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The fill of the trench introduce local lateral mechanical stress. So with <=0.25u you a get a further mismatch contributor.
 

YESH_23

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what is meant by narrow width effect...?

thanx in advance
 

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