What is a shallow trench???

[gayaneg]

Hi!

Could anybody tell me, what is a shallow trench isolation? And its purpose.

Thanks in advance!

 

[demodb]

this is a way of isolating structures on a substrate, e.g. a nmos and a pmos. This way is preferred over LOCOS, because it uses a minimal area.

 

[wwwww25]

STI is usually used in .25 .18 and .13micron process.

 

[manissri]

to reduce the narrow width effect we genrally do the shallow trench isolation
regrds
manis

 

[rfsystem]

The fill of the trench introduce local lateral mechanical stress. So with <=0.25u you a get a further mismatch contributor.

 

[YESH_23]

what is meant by narrow width effect...?

thanx in advance