U0 spice MODEL BSIM3 mos ptm ic HELP!

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sxa_axs

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PTM BSIM3 spice :
180nm ,UO=3.5E-02,
130nm ,UO=1.34E-02,
90nm, UO=5.5E-03,
65nm UO=0.06,
45nm UO=0.032,
32nm UO=0.039.
it's too small ,UO unit is? it's cm*2/vs ?
 

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