lionking819
Newbie level 3
tsmc epi
I was told by TSMC person that they have two epi layer option to select
1. normal epi (resistance 6-8Ohm)
2. special epi (no doping, really high resistance and thinner than normal epi)
does anybody use the special epi layer before?
to prevent latchup, which one is better?
thanks
I was told by TSMC person that they have two epi layer option to select
1. normal epi (resistance 6-8Ohm)
2. special epi (no doping, really high resistance and thinner than normal epi)
does anybody use the special epi layer before?
to prevent latchup, which one is better?
thanks