TCAD Sentaurus problem (version 2007.03)

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sam_2999

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sentaurus example

Hey

I have a file in the xgraph format that describes a 1D doping profile (x column describes distance from silicon surface while y column describes doping concentration) and I'm attempting to use subMesh1D function to incorporate it in my device structure. However, I'm having problem with the 'Range' parameter and how the keywords x1 and x2 should be set. For example, if I set x1 to be a certain distance, only the corresponding doping level at that distance and that of the silicon surface (i.e. at distance x=0) appears at the output .dat file. This is the case regardless of the meshing elements I define and place in the device.

If I didn't specify the range, it wouldn't import any values at all from the file (although the documentation says the entire dataset should be incorporated by default)

relevant excerpts of the _msh.cmd file

Definitions
{
AnalyticalProfile "p-epi layer"
{
Function = subMesh1D(datafile = "doping1d.dat", Scale =1, Range = line [(?), (?)])
LateralFunction = Gauss(Factor = 0.01)
}
}

Placements
{
Analyticalprofile "p-epi layer instance"
{
Reference = "p-epi layer"
ReferenceElement
{
Element = line [(-5 0), (5 0)]
Direction = negative
}
}
}
 

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