Oct 13, 2006 #1 C chang830 Full Member level 5 Joined Feb 11, 2006 Messages 267 Helped 14 Reputation 28 Reaction score 3 Trophy points 1,298 Activity points 3,424 Hi, Which process is better for the decreased substarte coupling effect? Any why?
Oct 13, 2006 #2 K kwkam Full Member level 5 Joined Feb 25, 2002 Messages 275 Helped 30 Reputation 60 Reaction score 13 Trophy points 1,298 Location Somewhere on earth Activity points 1,886 It can't easy to say which one is better for substrate coupling. It depends on the process itself.
Oct 13, 2006 #3 S sengyee88 Advanced Member level 4 Joined Oct 9, 2006 Messages 113 Helped 16 Reputation 32 Reaction score 1 Trophy points 1,298 Activity points 1,956 I believe proper substrate grounding and guard rings would help.