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Simulation of planar inductance in IE3D

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gary2007

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How can I simulate an planar spiral inductor which was manufactured on ltcc substrate. The spiral has 3 mm outer diameter, strip is 100 um width and space between strips 100 um. Number of turns 3,4,5.
I use mgrid editor in HyperLinx 15.21 and define two 125 um layers for substrate and bridge of spiral. In basic parameters I have
ground (automatically inserted), 125 um dielectric1, 125 um dielectric2 and air (automatically inserted). In Metallic Strip Types i have thickness 9 um and sigma 3e7. I use 1(0) and 2(0) Advanced Extension port and meshing 90 MHz, Cells per Wavelength 20, AEC Layers = No. Then Lumped model 2-port PI with series RL and Shunt RC. When I change number of turns or strip width or dielectric thickness layer obtain significantly different results. The graph clearly shows no self-resonance. Please tell me what I do wrong. Should I use a port -1, +1 ?
 

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