Silvaco ATLAS ATHENA coding problem

[winsomeharis86]

Hi guys,

I have two questions:

First:
How can we grow Amorphous Silicon in Silvaco ATHENA? There is a variety of materials avaialable in ATHENA options but I can't find amorphous silicon.

Second:
I am writing a code in Silvaco where basically I have drawn structure in ATHENA using "deposit" and "implant" command. Now i have exported that structure file to the ATLAS and there in ATLAS I want to add layers to the already available structure. I have tried traditional method of using "mesh" and "region" commands but that doesn't solve the problem.

Any help will be appreciated guys.

 

[Colbhaidh]

Amorphous silicon is the same as poly silicion but with a different grain structure. However it is electrically identical so just use polysilicon.
Atlas cannot add process layers to a simulation. This must be done in Athena.

 

[ieee7]

hi,
i want a simulation of silicon nanowire fet with silvaco
Can anyone help me please?

thanks