shielding of capacitance - what is the purpose?

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hacksgen

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shielding of capacitance

Hi everyone,

Can anyone explain me what is the purpose of shielding or point me to where i can find more about it. If you have mimcap say between metal 3 and metal 4 layers and u use metal 2 as a shield for example. what purpose does it serve. will the mim cap be unaffected by the substrate parasitics . what about the parasitics capacitance from mim cap to substrate. will it go down.

Thanks.
 

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