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S-Parameter-Based IC Interconnect Transmission Line Characterization

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Here I want to work on layout of Mosfet using the method proposed in S-Parameter-Based IC Interconnect Transmission Line Characterization by William R. Eisenstadt, Senior Member, IEEE, and Yungseon Eo and I am using Transmission Line microstrip substrate for achiving my layout but don't how to define different parameters for it which are for mosfet.Please help me.
 

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