I use momentum (in ADS) and HFSS to simulate planar incuctor,but the two inductor values are different as much as 20% and the Q factor is also different. I don't know which is closer to ture value.could anyone give me some suggestion?thanks!
For planar structures, ADS is closer if you have set sufficiently meshing density and edge meshing.
this has been proven in many times by developers and designers.
ADS2005A gives the best simulated value for such planar structures.