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on-wafer SOLT calibration with cascade air coplanar probes

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elektr0

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Hello,

Cascade specifies an Lterm coefficient of minus 1.7pH, which means the probes contacting the load standard on the impedance substrate behaves capacitive.

With HP8510 oder Agilent PNA-X vector network analyzers we cannot enter inductance parameters for the load standard directly.
In case of a postive Lterm, we can use the expression
TIME DELAY = Lterm / Z0
and model the inductance as a transmission line with 500 Ohm (e.g.) and +0.0034ps delay.

What do I have to enter to model negative inductance. Of course it should be a small section of low impedance line (Z0=5 Ohm, e.g.).
Which delay time value corresponds to minus 1.7pH ?

Thank you very much.

-e
 

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