Jan 24, 2006 #1 L layout_designer Member level 5 Joined Jan 9, 2006 Messages 87 Helped 14 Reputation 28 Reaction score 6 Trophy points 1,288 Activity points 1,869 trench Hi how is a trench constructed? What layers are used? How is it useful in latchup protection? Will be grateful if anyone would enlighten me. Thanks
trench Hi how is a trench constructed? What layers are used? How is it useful in latchup protection? Will be grateful if anyone would enlighten me. Thanks
Jan 27, 2006 #2 Son Newbie level 5 Joined Jan 21, 2006 Messages 8 Helped 2 Reputation 4 Reaction score 0 Trophy points 1,281 Location France Activity points 1,342 Re: Trench Construction Very quick. -mask -plasma etching -fill with SiO2 -fill with polysilicon **broken link removed** A deep trench is like a wall, it prevents parasitic currents making the chip less sensitive to LU. STI has no effect on LU. Son.
Re: Trench Construction Very quick. -mask -plasma etching -fill with SiO2 -fill with polysilicon **broken link removed** A deep trench is like a wall, it prevents parasitic currents making the chip less sensitive to LU. STI has no effect on LU. Son.