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Need information on trench construction

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layout_designer

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trench

Hi
how is a trench constructed?
What layers are used?
How is it useful in latchup protection?

Will be grateful if anyone would enlighten me.
Thanks
 

Son

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Re: Trench Construction

Very quick.

-mask
-plasma etching
-fill with SiO2
-fill with polysilicon

deeptrench3zq.jpg


A deep trench is like a wall, it prevents parasitic currents making the chip less sensitive to LU. STI has no effect on LU.

Son.
 

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