Hi, rf-en:
I checked it for you and I don't see any problem in your model. You didn't enable AEC and you may lose a little bit in accuracy. However, it should not affect the main part. I can see the simulated data is not matching the measure data from the paper. However, it does not seem to me there is any problem in the simulation results. IE3D should be quite accurate for such a structure. I would suspect that some dimensions are not correctly documented in the paper and there is some diescrepency between the reported structure and the physical structure. Regards.