MOSFET Overlap capacitance measurement

[engrak]

overlap capacitance

can anybody tells how to extract MOSFET overlap capacitance?

 

[pbs681]

mosfet capacitance measurement

can anybody tells how to extract MOSFET overlap capacitance?

read BSIM3 manual under capacitance chapter....

basically, in order to get a good result, you should start with special test structure....

 

[engrak]

overlap capacitance measurement

i have special structure available like NMOS array of sizes 10x10 and 10X0.35 , but
i got two different values of overlap capacitance from these two sizes , but this can not possible is same process technology.so why two sizes are given? i measuring the overlap capacitance by using LCR meter.

 

[pbs681]

mosfet capacitance measurements

i have special structure available like NMOS array of sizes 10x10 and 10X0.35 , but
i got two different values of overlap capacitance from these two sizes , but this can not possible is same process technology.so why two sizes are given? i measuring the overlap capacitance by using LCR meter.

the small length effect cause the differences..... normally, the overlap cap is charecterised by using 10/0.35 for ur case......

 

[engrak]

mosfet+capacitances measurement

i want to know the reason why short channel length array should use to calculate the overlap capacitance.

 

[pbs681]

capacitance measurement of mosfet

i want to know the reason why short channel length array should use to calculate the overlap capacitance.

I am not sure what is exactly ur test structure looks like..... but if u use 10/10 array, then the test structure is very big in order to get a reasonable capacitance value from your measurement..... u hv to makesure the capacitance value from the easurement is much larger than system capacitance.....