i have special structure available like NMOS array of sizes 10x10 and 10X0.35 , but
i got two different values of overlap capacitance from these two sizes , but this can not possible is same process technology.so why two sizes are given? i measuring the overlap capacitance by using LCR meter.
i have special structure available like NMOS array of sizes 10x10 and 10X0.35 , but
i got two different values of overlap capacitance from these two sizes , but this can not possible is same process technology.so why two sizes are given? i measuring the overlap capacitance by using LCR meter.
I am not sure what is exactly ur test structure looks like..... but if u use 10/10 array, then the test structure is very big in order to get a reasonable capacitance value from your measurement..... u hv to makesure the capacitance value from the easurement is much larger than system capacitance.....