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Hi,
If you are a mechanical engineer you can workout with basic cantilever beams.
If you wish to use them in biosensors then, you can go through the literature where a lot of materials and shapes of the beams are available and upon inspiration you can propose your own.
If you are interested in communications then look for literature in RF MEMS. You can find a nice on the same in our board still alive. For any you need to have a cad design skills if you wish to use simulation tools.
Pick-up the book called "Practical MEMS", it suits both the basic and advanced reader. I am an EE, duh, and that book helped me understand MEMS at various levels of abstraction.
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