Maximum Metal Width for Technology

[vlsi.aj]

Hi,

What are the rules or how the maximum metal width is decided in any particular technology i.e. 130nm or 65nm. ?
OR
On What basis maximum metal width is decide in any technology?

 

[marvel321]

It is decided by fab process i.e. CMP

 

[dick_freebird]

At some point film stress / strain can become a reliability
issue (forming hillocks, hurting planarity and maybe even
photolithography). There is also a local layer density upper
and lower bound, which a semi-infinite slab would violate.

Above a certain width you ought to see slotting rules that
force these issues back into their "box".

The rules may be derived by experiment, or rule of thumb,
or wild guess and lack of challenge from layout people. You
may never know, depending on how communicative your
foundry process engineers are.