[m]What is the difference between "Damascene copper" interconnect and normal copper ?

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RohithRaj

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[m]What is the difference between "Damascene copper" interconnect and normal copper ?

Hi,

What is the difference between "Damascene copper metal interconnect and normal copper interconnect" ?

What are the advantages of using "Damascene copper" as a top level metal in VLSI chip design ?


Thanks in advance,
Rohith
 

Re: [m]What is the difference between "Damascene copper" interconnect and normal copp

It has to do with deposition. You create holes and overdeposit on top of it to fill the holes. I am not a process guy, but my understanding is that dual-damascene is the standard today, meaning that you deposit vias and metal at the same time.
 
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