I need some information about layout density rules. I want min and max density of different layers.
You might say that it depends on process. But a typical number is required. like numbers in a common process.
Also, I need information about thermal conductivity of materials used in different layers.
Density rules are based on the particular foundry's litho
capabilities.
Thermal conductivity, I just Google for and pull off whatever
site coughs it up first. But those constants are only part of
the picture, the layer thicknesses are another foundry-
specific bit of information.
Density rules are based on the particular foundry's litho
capabilities.
Thermal conductivity, I just Google for and pull off whatever
site coughs it up first. But those constants are only part of
the picture, the layer thicknesses are another foundry-
specific bit of information.