Thank you again! For the filler cells I calculated the leakage and it is definitly doable for my current design.
The only problem I have now is that I get DRC errors during LVS (not during DRC). It says unstable device fpr pdiode_DIODE_105. It has the error both at the diffusion area of the LOGIC1 cell (it contains a resistor and a diode) and also at a NO3L cell where there isn't even a diode (Error is shown also at a diffusion area, see
https://imgur.com/a/k7GE4at).
Maybe you have an idea, since I searched the DRC files provided by xfab (I am working with XO35) and haven't found anything about diodes or unstable devices.
Greetings,
Alex